MINI CORI-FLOW Series ML120

Mass flow accuracy

Liquid: ±0,2% of rate; Gas: ±0,5% of rate

Repeatability

±0,05% of rate ±1 /2 (ZS* x 100/flow)% based on digital output

Warm-up time

approx. 1 /2 hour after power up for optimum performance

Zero stability (ZS)

< ±10 mg/h

( Guaranteed at constant temperature and for unchanging process and environment conditions.)

Density accuracy

< ±5 kg/m3

Temperature accuracy

±0,5 °C

Mounting***

Any position, attitude sensitivity negligible

( To be rigidly bolted to a stiff and heavy mass or construction for guaranteed zero stability.) ( External shocks or vibrations should be avoided. )

Device temperature

0…70°C

Response time, meter (t98%)

≤200 msec

Power supply

+15…24 Vdc (Max. ripple recommended: 50 mV tt)

Analog output/command

0…5 (10) Vdc, min. load impedance > 2 kΩ; 0 (4)…20 mA (sourcing),

max. load impedance < 375 Ω

Digital communication

Standard RS232; Options: PROFIBUS DP, DeviceNet™, Modbus RTU/ASCII, FLOW-BUS, EtherCAT®, PROFINET

어플리케이션

• 반도체 산업

• 태양전지 및 FPD 산업

• 식품 및 제약 산업

• 의료, 미량화학 또는 분석 설비

• 교정 실험실